Fabrication and Design of Resonant Microdevices 1st Edition, ISBN-13: 978-0815515777

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Fabrication and Design of Resonant Microdevices 1st Edition, ISBN-13: 978-0815515777

[PDF eBook eTextbook]

  • Publisher: ‎ William Andrew; 1st edition (September 17, 2008)
  • Language: ‎ English
  • 250 pages
  • ISBN-10: ‎ 0815515774
  • ISBN-13: ‎ 978-0815515777

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry.

Dr. Behraad Bahreyni is the author of more than 40 publications including papers in refereed journals and conference proceedings and technical reports. He has also served as a reviewer for several technical journals and international conferences and is the recipient of several teaching and research awards at the institutional and national levels. Dr Bahreyni is an assistant professor in the School of Engineering Science at Simon Fraser University, BC, Canada.

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